Compact Alignment Stages combine linear and rotary motor motion to create a compact, low profile XYθ positioning table. The X-table for linear motion is combined with the θ-table for rotary positioning in the basic configuration. Other designs can be easily specified including stage to achieve XY or XYθ motion. A coreless linear motor, miniature linear way and crossed roller bearing combine to achieve an extremely low profile when compared to ball screw-driven stages.
- Extremely high resolution and accuracy are achieved using closed loop control and a high resolution linear encoder.
- Five sizes are available with various sectional shapes.